M. Sugawara
Kazuo Nojiri
P. H. L. Notten
Symposium on Plasma Processing (13th 2000 Toronto, Ont.)
Stephen M. Rossnagel
Larry F. Thompson
J. W. Coburn
Ronald A. Powell
Christer Hedlund
Russ A. Morgan
August Friedrich Bogenschütz
V. A. Perevoshchikov
Unknown Author
Stanley Wolf
G. S. Mathad
Electrochemical Society.
Symposium on Plasma Processing (5th 1984 New Orleans, La.)
International Symposium on Plasma Processing (14th 2002 Philadelphia, Pa.)
Québec) Symposium on Plasma Processing (8th 1990 Montréal
Symposium on Highly Selective Dry Etching and Damage Control (1993 Honolulu, Hawaii)