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Symposium on Plasma Etching and Deposition (1980 Hollywood, Fla.)
P.F. Williams
V. I͡U Kireev
Sebastian Engelmann
M. Elwenspoek
Journées d'études sur la gravure sèche en microélectronique (2nd 1983 Grenoble, France)
W. Nicholas G. Hitchon
Anna M. Barklund
Materials Research Society. Meeting Symposium.
Nicolas Posseme
R. Rosenberg
Unknown Author
Uzodinma Okoroanyanwu
International Symposium on Plasma Process-Induced Damage (2nd 1997 Monterey, Calif.)
G. S. Mathad
Symposium on Etching for Pattern Definition (1976 Washington, D.C.)
Russ A. Morgan
Anthony F. Bernhardt